Vacuum pump
US4826394A · kind A · utility
13Cited by
2References
6Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jan 22, 1988 |
| Grant date | May 2, 1989 |
| Priority date | — |
| Expiry date | Jan 22, 2008 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF04D19/046
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
A turbo-molecular vacuum pump has a high vacuum side and a fore vacuum side in the form of a molecular pump in which the rotor and stator are frusto-conically shaped. The frusto-conically shaped rotor surface has a helical groove. An axial bearing for the rotor is located at an imaginary apex point of the conically-shaped surface of the rotor. The surface of the bearing containing the imaginary apex point is stationary relative to the stator. The rotor and stator are formed of a high heat conductivity material.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.