Patent · US Expired

Silicon micromachined compound nozzle

US4828184A · kind A · utility

82Cited by
5References
15Claims
0Family size

Assignee

Inventors

Key dates

Filing dateAug 12, 1988
Grant dateMay 9, 1989
Priority date
Expiry dateAug 12, 2008

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10T29/49432
  • WIPO fieldChemical engineering
  • WIPO sectorChemistry

Abstract

A silicon compound nozzle has two generally planar parallel plates with offset openings coupled by a shear gap. Fluid flow in the shear gap is generally parallel to the plates and increases fluid dispersion.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.