Surface analyzer
US4829179A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jul 6, 1987 |
| Grant date | May 9, 1989 |
| Priority date | — |
| Expiry date | Jul 6, 2007 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J49/142
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A surface analyzer for analyzing physical properties of the surface of a sample by means of PELS (Proton energy loss spectroscopy) in which accelerated ion beams such as proton beams impinge on the sample in the vertical direction to the surface of the sample and ion beams scattered from the sample are decelerated and then detected by an analyzer to analyze the energy loss of the ion beams. The surface analyzer comprises an ion beam source for generating ion beams, deflecting means for deflecting the ion beams from the ion beam source, irradiating the surface of the sample with the ion beams from the ion beam source in the vertical direction to the surface of the sample, and deflecting scattered ion beams from the sample, accelerating and decelerating means for accelerating the ion beams before the ion beams impinge on the sample and decelerating the scattered ion beams, and analyzing means for detecting the scattered beams and analyzing energy loss of the ion beams.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.