Production of shaped articles of ultra-pure silicon
US4831964A · kind A · utility
1Cited by
6References
3Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 24, 1987 |
| Grant date | May 23, 1989 |
| Priority date | — |
| Expiry date | Dec 24, 2007 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC01B33/035
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
Shaped articles, e.g., bars, of semiconductor-grade, ultra-pure silicon, are facilely and efficiently produced by thermally decomposing/pyrolyzing a monosilane feedstream on a red-heated silicon support member, whereby high purity silicon is deposited thereon, and thence recycling the majority of the by-product reaction admixture into said monosilane feedstream.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.