Method of holding an electrically insulating sample
US4833331A · kind A · utility
0Cited by
2References
13Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 23, 1987 |
| Grant date | May 23, 1989 |
| Priority date | — |
| Expiry date | Oct 23, 2007 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J49/142
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
This invention relates to a method of holding an electrically insulating sample to be bombarded with a corpuscular beam. It is desired that the electrically insulating sample is not charged up when it is placed under the bombardment of the corpuscular beam. To achieve this problem to be solved, an electrically conductive metallic material is placed in a liquefied form on a support member, and the electrically insulating sample is buried in the metallic material except at least the portion that is to be bombarded with the corpuscular beam.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.