Shape measuring apparatus
US4834530A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Apr 17, 1987 |
| Grant date | May 30, 1989 |
| Priority date | — |
| Expiry date | Apr 17, 2007 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B11/2536
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A shape measuring apparatus is disclosed. It comprises a pattern portion having a pattern in which pattern elements are arranged in the pitch width direction according to a predetermined rule so that a plurality of N codes can be distinguished with respect to one another; a projecting portion having a moving portion for moving the pattern in the pitch width direction according to a rule and projection optical system for projecting the pattern onto an object to be measured; a detecting portion for detecting a first detection data and a second detection data by measuring a surface information of the object to be measured on which the pattern is projected from two different directions every time the pattern is moved by the moving portion; an extracting portion for extracting a first position data and a second position data corresponding to a point position of the object to be measured from the first and second detection data respectively; and a calculating portion for calculating a coordinate of the point position corresponding to the first position data of the object to be measured from the first position data and the second position data.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.