1,2-Naphthoquinone diazide sulfonyl ester compound with linking benzotriazole groups and light-sensitive composition with compound
US4835085A · kind A · utility
2Cited by
6References
6Claims
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Key dates
| Filing date | Oct 7, 1987 |
| Grant date | May 30, 1989 |
| Priority date | — |
| Expiry date | Oct 7, 2007 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/022
- WIPO fieldOrganic fine chemistry
- WIPO sectorChemistry
Abstract
Compounds of the general formula (I) or (II) ##STR1## in which R is 1,2-naphthoquinone-2-diazide-4- or -5-sulfonyl and X is a straight-chain or branched C.sub.1 -C.sub.12 -alkylene group, which is unsubstituted or mono- or disubstituted by OH group or is --CH.dbd.CH--, are suitable as the light-sensitive component in photoresist materials. Both positive and negative images can be prepared with light-sensitive mixtures containing these compounds and a binder.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.