Non-destructive energy beam activated conductive links
US4835118A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Mar 23, 1987 |
| Grant date | May 30, 1989 |
| Priority date | — |
| Expiry date | Mar 23, 2007 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S438/934
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A process of manufacturing selectively restructurable conductive links between circuit elements and corresponding spare elements on a semiconductor. A continuous green light laser directed at a non-conductive amorphous region in the links causes the region to recrystallize. This makes the link electrically conductive thereby joining the circuit elements to a corresponding spare element on the semiconductor. The method permits for high density packing of circuit elements and creates a link without producing bulk material movement.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.