Pressure reducer for pure gases
US4836242A · kind A · utility
10Cited by
17References
6Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 12, 1988 |
| Grant date | Jun 6, 1989 |
| Priority date | — |
| Expiry date | May 12, 2008 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/8122
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A pressure reducer, especially adapted for the supply of very pure gas in the electronics industry, which comprises a final stage having an inlet, pressure-reducing means and a low-pressure outlet. A filter having a filtration threshold lower than a micron is interposed between the pressure-reducing means and the low pressure outlet.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.