Continuous cryopump with a method for removal of solidified gases
US4838035A · kind A · utility
8Cited by
7References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 5, 1988 |
| Grant date | Jun 13, 1989 |
| Priority date | — |
| Expiry date | May 5, 2008 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/24149
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
An improved cryopump for the removal of gases from a high vacuum, comprising a cryopanel incorporating honeycomb structure, refrigerant means thermally connected to the cryopanel, and a rotatable channel moving azimuthally around an axis located near the center of the cryopanel, removing gases absorbed within the honeycomb structure by subliming them and conducting them outside the vacuum vessel.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.