Positive-working radiation-sensitive recording material with radiation-sensitive 1,2-quinone diazide underlayer and thicker positive-working radiation-sensitive overlayer

US4840867A · kind A · utility

Assignee

• Hoechst GmbH · DE

Inventors

• Andreas Elsaesser · Idstein, DE
• Klaus Rode · Treuchtlingen, DE

Key dates

• Filing date: Jun 17, 1987
• Grant date: Jun 20, 1989
• Expiry date: Jun 17, 2007

Classification

• Technology area (CPC G): Physics
• CPC primary: G03F7/095
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

A radiation-sensitive recording material comprising a support and first and second radiation-sensitive layers is disclosed. The first radiation-sensitive layer comprises a 1,2-quinone diazide as the radiation-sensitive compound and the second radiation-sensitive layer comprises (a) a compound which forms a strong acid under the action of actinic radiation, (b) a compound which has at least one acid-cleavable C-O-C bond and (c) a polymeric binder. The recording material has an improved storage stability as compared with materials which comprise only radiation-sensitive layers based on acid-cleavable compounds.