Double-chamber ion source
US4841197A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | May 27, 1987 |
| Grant date | Jun 20, 1989 |
| Priority date | — |
| Expiry date | May 27, 2007 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/08
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Ion source including an electric discharge chamber body divided by a partition, having an anode electrode therein, into a main discharge chamber and a subsidiary discharge chamber. The subsidiary discharge chamber has a filament mounted therein aligned with at least one small opening through the partition wall and the anode electrode. An inert gas opening is provided into the subsidiary discharge chamber. An electric discharge gas opening and an ion outlet opening are provided to the main discharge chamber. Magnets are provided outside of the chamber body for creating a magnetic field extending nearly along an axis of the at least one small opening in the anode electrode.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.