Vacuum vapor transport control
US4842827A · kind A · utility
14Cited by
1References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 30, 1986 |
| Grant date | Jun 27, 1989 |
| Priority date | — |
| Expiry date | Dec 30, 2006 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05D7/01
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A vacuum vapor transport control system and method for controlling the rate of vapor flow from a reagent reservoir into a vacuum system through an orifice calibrated as to size or flow rate using a high purity fixed gas and vapor provided from multiple reservoirs or mixed vapor provided from a single reservoir.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.