Ceramic coatings from the pyrolysis in ammonia of mixtures of silicate esters and other metal oxide precursors
US4842888A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Apr 7, 1988 |
| Grant date | Jun 27, 1989 |
| Priority date | — |
| Expiry date | Apr 7, 2008 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/02282
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
Hydrolyzed or partially hydrolyzed mixtures of silicate esters and metal oxide precursors, are pyrolyzed at relatively low temperature in the presence of ammonia to form ceramic coatings on substrates such as electronic devices. The metal oxide precursors are soluble compounds, for example alkoxides, of aluminum, titanium, or zirconium. The coatings produced are useful for the protection of electronic devices. One or more coatings containing amorphous silicon, silicon carbon, silicon nitrogen, or silicon carbon nitrogen can be applied over the nitrided ceramic SiO.sub.2 /metal oxide coating for still further protection of electronic devices.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.