Method for contactless testing for electrical opens and short circuits in conducting paths in a substrate
US4843329A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Oct 9, 1987 |
| Grant date | Jun 27, 1989 |
| Priority date | — |
| Expiry date | Oct 9, 2007 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/308
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method for contactlessly testing for opens and shorts in conducting paths within or on a nonconducting substrate. There are a plurality of conducting pads on the surface of the substrate. Charges are contactlessly generated, e.g., by an optical beam, in at least one selected pad inducing a voltage thereon and on pads electrically connected therewith through one of the conducting paths. A two dimensional electron flux is contactlessly caused to be emitted from the selected pad and at least one other pad of the plurality of pads, e.g., by an optical beam. The flux emitted from the pads depends on the voltage on each pad. The flux is detected to distinguish pads in electrical connection.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.