Method for depositing ultrathin laminated oxide coatings
US4844951A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Oct 30, 1987 |
| Grant date | Jul 4, 1989 |
| Priority date | — |
| Expiry date | Oct 30, 2007 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/405
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A method for depositing a wear resistant composite ceramic coating on a cemented carbide or hard ceramic substrate. A gas mixture is passed over the substrate, including a halide vapor of Al, Zr, or Y and one or more oxidizing gases at about 900.degree.-1250.degree. C. for the cemented carbide or about 900.degree.-1500.degree. C. for the ceramic and between about 1 torr and about ambient pressure. During the deposition of the oxide, a different halide of Al, Zr, or Y is pulsed into the gas mixture. The parameters are controlled to deposit a fully dense, adherent, wear resistant, laminated oxide coating about 0.3-20 microns thick on the substrate having at least three layers each about 0.1-3 microns thick and each predominantly of a different material than that of the adjacent layers. Optionally, the process may be controlled to produce at least one layer in which discrete particles of the material predominantly in an adjacent layer are present in a matrix of the predominant material of the layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.