Zirconium thin-film metal conductor systems
US4847445A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Feb 1, 1985 |
| Grant date | Jul 11, 1989 |
| Priority date | — |
| Expiry date | Feb 1, 2005 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/24917
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A thin-film metal conductor system using a zirconium adhesion layer is disclosed. The system is formed by first plating a layer of zirconium over a substrate material and any electrical components, such as resistors, which are fixed on the substrate. A conductive layer is then deposited over those portions of the zirconium layer which are to provide conductive pathways. The resulting unit is thermally treated in an oxidizing environment, such as air, to oxidize the exposed portions of the zirconium layer and thereby form regions of zirconium oxide. The zirconium oxide is nonconductive and protects underlying components from moisture and physical abrasion.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.