Wafer and method of making same
US4847732A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jun 8, 1988 |
| Grant date | Jul 11, 1989 |
| Priority date | — |
| Expiry date | Jun 8, 2008 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/19041
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Disclosed is a wafer substrate for integrated circuits 1 which by itself may be made either of conductive or non-conductive material. This substrate carries two planes or layers of patterned metal 19,20, thus providing two principal levels of interconnection. A programmable amorphous silicon insulation layer 21 is placed between the metal layers. There are sheet lower metal layers with an insulator which permit power distribution across the wafer. Connections between the metal layers or between the metal layer and the substrate can be made through via holes in the insulator layers or layers, respectively. Pedestals are provided for bonding.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.