Cathode arc discharge evaporating device
US4849088A · kind A · utility
29Cited by
3References
6Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 14, 1988 |
| Grant date | Jul 18, 1989 |
| Priority date | — |
| Expiry date | Mar 14, 2008 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C14/325
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Cathode arc discharge evaporating device having a body of revolution as cathode. The target surface is arranged at the outside surface of the body of revolution. To control movement of the arc spot a magnetic field generating device is provided inside the body of revolution, which may be moveable with respect to the cathode.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.