Multilayer ceramic coatings from metal oxides and hydrogen silsesquioxane resin ceramified in ammonia
US4849296A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Dec 28, 1987 |
| Grant date | Jul 18, 1989 |
| Priority date | — |
| Expiry date | Dec 28, 2007 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/31678
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Mixtures of hydrogen silsesquioxane resin and metal oxide precursors such as acyloxy and alkoxy compounds of aluminum, zirconium, and titanium can be coated on substrates and subsequently ceramified at low temperature in the presence of ammonia, with or without platinum or rhodium catalysis, to form a nitrided ceramic coating on the surface of the substrate. The nitrided coatings produced are useful as interlevel dielectric films or for planarizing and protecting the surface of electronic devices. For further surface protection, overcoating the nitrided coating with an additional layer of a passivating ceramic material and a top layer of a barrier ceramic material is also described.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.