Charged particle analyzer
US4849629A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Nov 13, 1987 |
| Grant date | Jul 18, 1989 |
| Priority date | — |
| Expiry date | Nov 13, 2007 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J49/488
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A charged particle analyzer comprises a spherical grid, a spherical electrode, a screen plate, and a detector. The spherical electrode is outside of the spherical grid and is concentric with the spherical grid. The screen plate has an entry window and an exit opening, which are symmetrical with the center of the sphere of the spherical grid. A sample is disposed at the entry window of the screen plate. The detector is positioned behind the exit opening to detect charged particles emitted from the sample. The charged particles having the same energy can travel through the exit opening of the screen plate, and their amount or their angular distribution is measured.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.