Inductively excited ion source
US4849675A · kind A · utility
65Cited by
1References
15Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jul 30, 1987 |
| Grant date | Jul 18, 1989 |
| Priority date | — |
| Expiry date | Jul 30, 2007 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J27/16
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
The invention relates to an inductively excited ion source with a vessel (1) around which a coil (2) is wound. The vessel (1) consists of a chemically inert material and is used to receive the substance to be ionized. A high-frequency generator (12) is connected by one of its terminals to the coil (2) both ends of which are grounded, while the other terminal (22) is also grounded. The length of the coil (2) which is to be regarded as an electrically long conductor, is .lambda./2, .lambda. being the wavelength of the voltage of the high-frequency generator (12) (FIG. 3).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.