Force detecting device
US4849730A · kind A · utility
39Cited by
1References
8Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 17, 1987 |
| Grant date | Jul 18, 1989 |
| Priority date | — |
| Expiry date | Feb 17, 2007 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L5/162
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A force detecting device includes an insulative strain element, strain sensors, and leads. The insulative strain element is electrically insulative at least at its surface. The strain sensors are formed of a piezoresistive thin film and deposited as a piezoresistive thin film pattern on the surface of the insulative strain element integrally therewith. The leads are formed of a highly conductive thin film and deposited as a highly conductive thin film pattern on the surface of the insulative strain element integrally therewith.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.