Patent · US Expired

Thin film transistor

US4849797A · kind A · utility

59Cited by
2References
19Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJan 20, 1988
Grant dateJul 18, 1989
Priority date
Expiry dateJan 20, 2008

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY02E10/548
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

In a thin film transistor which has an active layer formed between source and drain electrodes, a gate insulating film formed in contact with the active layer, and a gate electrode formed in contact with the gate insulating film, the photoconductivity of the active layer is reduced by forming the active layer of amorphous silicon carbide (a-Si.sub.1-x C.sub.x) whose carbon content x is greater than 0.1.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.