Patent · US Expired

Apparatus for lapping and polishing optical surfaces

US4850152A · kind A · utility

52Cited by

5References

6Claims

0Family size

Assignee

Carl Zeiss Stiftung · DE

Inventors

Erich Heynacher · Heidenheim, DE
Klaus Beckstette · Aalen, DE
Michael Schmidt · Weiterstadt, DE

Key dates

Filing date	Jan 25, 1988
Grant date	Jul 25, 1989
Priority date	—
Expiry date	Jan 25, 2008

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB24B21/16
WIPO fieldMachine tools
WIPO sectorMechanical engineering

Abstract

The workpiece which is moved relative to the tool is processed by a tool configured in the form of a flexible membrane. On the rearward side of the membrane, loading units are arranged with the force of each unit being individually controlled. The pressure distribution exerted by the loading units on the workpiece is varied with time in dependence upon the position of the workpiece. With the method, large optical components such as telescope mirrors and grazing-incidence optical elements for x-ray telescopes can be polished more quickly than by the heretofore known methods. Also non-rotationally symmetrical defects of the surface can be eliminated. An apparatus for carrying out the method of the invention is disclosed.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.