Pressure sensor and method of fabrication thereof
US4850227A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Dec 22, 1987 |
| Grant date | Jul 25, 1989 |
| Priority date | — |
| Expiry date | Dec 22, 2007 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49103
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A pressure sensor includes a three part package including a housing member defining two spaced-apart chambers, a bottom member providing the bottom wall of one of the chambers, and a top cover member hermetically sealing the two chambers from one another and including a port for admission of gases into one of the chambers. A pressure sensing element is disposed in the chamber having the port and mounted on the bottom member, and a signal processing element is mounted in the other chamber. Electrical connections between the two elements are by means of leads which extend into each chamber and pass through a wall separating the chambers. A low temperature differential between the two elements is provided by extending one of the leads from the other one chamber to a position directly underlying and in intimate contact with the bottom surface of the processing element in the other chamber. Additionally, the bottom member is of a high thermal conductivity material and extends along the bottom of the housing member to beneath the other chamber.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.