Film thickness-measuring apparatus using linearly polarized light
US4850711A · kind A · utility
18Cited by
3References
7Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 11, 1987 |
| Grant date | Jul 25, 1989 |
| Priority date | — |
| Expiry date | Jun 11, 2007 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/211
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A linearly polarized light beam is applied to the surface of a film and is reflected therefrom. The beam is then split into three light beams by three or four optical flats. These light beams are applied to photoelectric conversion devices after passing through analyzers with fixed analyzing angles. The photoelectric conversion devices convert the beams into electric signals representing the intensities of these light beams. Two ellipsometric parameters .psi. and .DELTA. are calculated from these three electric signals.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.