Energy-selected electron imaging filter
US4851670A · kind A · utility
24Cited by
8References
9Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Aug 28, 1987 |
| Grant date | Jul 25, 1989 |
| Priority date | — |
| Expiry date | Aug 28, 2007 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J49/46
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Quadruple lenses 30, 31 and 32 and sextupole lenses 40, 41, 42, and 43 are interposed between a energy-dispersing device 17 and an electron imaging device 50 in an energy-selected electron imaging filter. The energy-dispersing device produces a focussed spectrum 21 of electron energies in the plane of an energy-selecting slit 20, and the quadrupole and sextupole lenses transform the spectrum into an energy-selecting slit may also be either removed or opened wide, and the quadrupole lenses may be refocussed, so that the electron imaging device directly observes a magnified spectrum of the electron energies.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.