High temperature environmental testing apparatus for a semiconductor device having an improved holding device and operation method of the same
US4851764A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | May 12, 1987 |
| Grant date | Jul 25, 1989 |
| Priority date | — |
| Expiry date | May 12, 2007 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/2879
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An improved holding device for holding a semiconductor device, particularly a microwave semiconductor device, in a high temperature environmental testing apparatus. The holding device includes a heat block having a heat source therein, and a cooling block for cooling the microstrip matching circuits and coaxial connectors. Both blocks are spatially isolated from each other by an air space. The semiconductor device is set on the top surface of the heat block. As a result, the semiconductor device is effectively heated up to the predetermined testing temperature, while the microstrip matching circuits and the connectors are protected from the temperature rise caused by the heat flow from the heat block. Appropriate grounding arrangements for the semiconductor device are provided by a metal foil for projections on the side walls of the cooling block.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.