Glow discharge mass spectrometer
US4853539A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jun 8, 1987 |
| Grant date | Aug 1, 1989 |
| Priority date | — |
| Expiry date | Jun 8, 2007 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J49/04
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
There is provided a mass spectrometer adapted for the elemental analysis of a sample, especially a solid sample, comprising a glow discharge ion source which yields ions characteristic of the elements in the sample. The background spectrum produced by such a mass spectrometer is substantially reduced by cooling the ion source below 20.degree. C., and preferably below -100.degree. C., thereby increasing the sensitivity and the accuracy of the spectrometer. The cooling of the ion source is preferably accomplished by flowing liquid nitrogen through a heat exchanger disposed in good thermal contact with it.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.