End effector
US4854623A · kind A · utility
1Cited by
2References
2Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jan 29, 1988 |
| Grant date | Aug 8, 1989 |
| Priority date | — |
| Expiry date | Jan 29, 2008 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/68707
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A passive cassette robotic end effector, without any moving parts, used for directly handling individual wafer cassettes. A pair of opposing arms of the end effector, each a mirror image of the other, secures to an independent external robotic handler mounting plate. The end effector positions about either end of the wafer cassette under cassette wall reinforcement bars located on opposing sides of a wafer cassette. Cavities with ramped alignment walls on the upper inner portion of each arm of the end effector accommodates and engages the cassette wall reinforcement bars.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.