Patent · US Expired

Method for manufacturing terminal contacts for thin-film magnetic heads

US4856181A · kind A · utility

19Cited by

4References

4Claims

0Family size

Assignee

SIMEMENS AKTIENGESELLSCHAFT · DE

Inventors

Alfred Pichler · Munich, DE
Joachim Hertrampf · Munich, DE
Horst Pachonik · Taufkirchen, DE

Key dates

Filing date	Aug 26, 1988
Grant date	Aug 15, 1989
Priority date	—
Expiry date	Aug 26, 2008

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10T29/49064
WIPO fieldAudio-visual technology
WIPO sectorElectrical engineering

Abstract

Method for manufacturing terminal contacts for thin-film magnetic heads. The method of manufacturing reinforced terminal contacts for thin-film magnetic heads provides a photolithographic process sequence that allows the technical requirements to be kept as low as possible and that reduces the gold consumption to a minimum. To that end, a copper layer for contact reinforcement fashioned as a tower is electrodeposited in contact windows formed by a photoresistive layer, which is electrodeposited onto an electrically conductive permalloy layer of a substrate before this is completely structured and has been provided with a protective aluminum oxide layer. A gold film required for the attachment of a bonding wire is finally deposited either directly preceding the protection or following the application of the aluminum oxide on the copper layer.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.