Microwave ion source
US4857809A · kind A · utility
26Cited by
8References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 27, 1988 |
| Grant date | Aug 15, 1989 |
| Priority date | — |
| Expiry date | Jun 27, 2008 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J27/18
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
In a microwave ion source utilizing a microwave and a magnetic field, a microwave introducing window has a multilayer structure of plates with different dielectric constants, a magnetic circuit is arranged to generate a magnetic field having a higher intensity than that defined by ECR (Electron Cyclotron Resonance) conditions so as to form a narrow high-density plasma, an ion extraction electrode has an ion extraction window whose contour falls within a center region of the narrow high-density plasma.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.