Patent · US Expired

Radiation-sensitive semiconductor device with active screening diode

US4857980A · kind A · utility

23Cited by
4References
9Claims
0Family size

Assignee

Inventor

Key dates

Filing dateJan 26, 1988
Grant dateAug 15, 1989
Priority date
Expiry dateJan 26, 2008

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY02E10/50

Abstract

A radiation-sensitive semiconductor device has a high-ohmic semiconductor wafer with a thicker edge portion and a thinner central portion, in which a photodiode is located. The surface opposite to the photodiode is provided with a highly-doped contact layer, on which a metal layer is provided. The central portion is so thin that at a low photodiode voltage the depletion zone of the photodiode extends as far as the contact layer. According to the invention, the device includes an active screening diode, which extends both in the edge portion and in the central portion and whose depletion zone extends in the operating condition in the central portion as far as the contact layer. As a result, diffusion of charge carriers from the edge portion to the photodiode is avoided.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.