Patent · US Expired

Optoelectrical measuring system and apparatus

US4859062A · kind A · utility

50Cited by

9References

21Claims

0Family size

Inventors

Gerhard Thurn · Berlin, DE
Theodor Gast · Berlin, DE

Key dates

Filing date	Jan 22, 1985
Grant date	Aug 22, 1989
Priority date	—
Expiry date	Jan 22, 2005

Classification

Technology area (CPC G)Physics
CPC primaryG01B11/303
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

The invention relates to measuring the surface roughness of a sample. A beam of light is directed onto the surface and the scattered light distribution is measured using a detector array. Either the average deviation or the second moment of the scattered light distribution is then determined, which are measures of the surface roughness.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.