Patent · US Expired

Chemical refill system

US4859375A · kind A · utility

72Cited by
15References
18Claims
0Family size

Assignee

Inventors

Key dates

Filing dateDec 29, 1986
Grant dateAug 22, 1989
Priority date
Expiry dateDec 29, 2006

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10T137/3127
  • WIPO fieldSurface technology, coating
  • WIPO sectorChemistry

Abstract

A system for automatically filling a bubbler, or other vapor delivery system from a reservoir, is disclosed in which the conduit system is purged and pressurized with inert gas, using a unique refill reservoir, level sensing and valving system.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.