Method of making a millimeter wave monolithic integrated circuit
US4861426A · kind A · utility
2Cited by
1References
3Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jan 23, 1989 |
| Grant date | Aug 29, 1989 |
| Priority date | — |
| Expiry date | Jan 23, 2009 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S438/969
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A method is provided of making a millimeter wave monolithic integrated ciit that allows for device isolation during epitaxial growth and integral heat sink with supporting circuitry on the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.