Laminar flow hood with static electricity eliminator
US4864459A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Oct 1, 1987 |
| Grant date | Sep 5, 1989 |
| Priority date | — |
| Expiry date | Oct 1, 2007 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02A50/20
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A frame is placed in the flow of incident air from a laminar flow hood, and bare wires and insulated wires are stretched over the frame. A source including a transformer produces an alternating voltage. One of the outputs thereof is directly connected to the insulating wires and the other output thereof is connected to the bare wires via a capacitor. An electrode placed inside the volume of the cabinet fed with air from the hood is connected to a DC amplifier which applies a correcting voltage to the insulated wires. This apparatus turns out to be highly effective, in particular, for removing dust and neutralizing charge when manufacturing VLSI circuits.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.