Gas phase preparation of aluminum nitride
US4865830A · kind A · utility
11Cited by
4References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 27, 1988 |
| Grant date | Sep 12, 1989 |
| Priority date | — |
| Expiry date | Jan 27, 2008 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC01P2004/64
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
Admixing an aluminum alkyl, and optionally a boron compound, with a hydride of nitrogen in the gas phase and maintaining a gas phase temperature, optionally in the presence of a carrier gas, and producing aluminum nitride alone or in admixture with a precursor thereof or boron nitride or both.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.