Spatial light modulator
US4867543A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Mar 25, 1988 |
| Grant date | Sep 19, 1989 |
| Priority date | — |
| Expiry date | Mar 25, 2008 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02F1/0102
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A modulator of the type including an array of light modulating elements. To afford fast response and thus greater modulation bandwidth these elements, each comprising a pair of electrodes and a reflector, are defined in a sheet layer of electro-optic solids material. In particular, this material may be of PLZT ceramics material or of a similar ceramic having a high electro-optic coefficient (quadratic). To advantage, the electrodes may be embedded in the sheet layer. Each modulating element is aligned with and connected to a corresponding drive circuit, part of an integrated circuit structure. Conveniently, solder bumps are used to this end. Light is directed onto the array of modulating elements by an optical interface. This may comprise an array of micro-lenses which too may be aligned by solder bumps. A second reflector may be added to each modulating element, each then being optically resonant.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.