Dusttight storage cabinet apparatus for use in clean rooms
US4867629A · kind A · utility
Assignees
Inventors
Key dates
| Filing date | Nov 20, 1987 |
| Grant date | Sep 19, 1989 |
| Priority date | — |
| Expiry date | Nov 20, 2007 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/14
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
There is disclosed a dusttight storage cabinet apparatus used for storing works such as wafer cassettes for containing semiconductor wafers. The storage cabinet apparatus includes: a housing having an entrance, formed in its front wall, for allowing works to come in and go out of the housing therethrough; an air supply duct for supplying the inside of the housing with clean air; a vertical rotation shaft rotatably disposed in the housing for turning about its longitudinal axis; a drive motor for turning the rotation shaft; and a rack assembly of a substantially cylindrical structure. The rack assembly is coaxially secured to the rotation shaft and has a plurality of compartments for storing the works therewithin. The compartments open radially outward and are partitioned off from one another so as to prevent cross contamination by dust among the compartments.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.