Apparatus for mounting workpieces

US4869801A · kind A · utility

Assignee

• Leybold GmBH · DE

Inventors

• Dirk Helms · Ahrensburg, DE
• Werner Katzschner · Gelnhausen, DE
• Anton Pawlakowitsch · Alzenau, DE
• Friedrich Anderle · Hanau, DE

Key dates

• Filing date: Mar 21, 1988
• Grant date: Sep 26, 1989
• Expiry date: Mar 21, 2008

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10S414/139
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

In an apparatus for mounting discoidal substrates in a vacuum chamber for reactive ionic etching purposes, a substrate holder joined to a hollow shaft and a bottom plate under the substrate holder are disposed, which together with spacers and a clamping ring form a displaceable cage partially surrounding the substrate holder and held coaxial to the latter, while the substrate which can be introduced through a gap in the lateral wall of the cage betwen two spacers can be laid on the substrate holder and locked in place there by the clamping ring after a relative movement between the substrate holder and the cage.