Movable member mounting
US4871244A · kind A · utility
3Cited by
2References
23Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jun 12, 1987 |
| Grant date | Oct 3, 1989 |
| Priority date | — |
| Expiry date | Jun 12, 2007 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S359/90
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The mounting of a movable member such as an optical mirror (3) by bridges (4-7) between a pair of supports (1, 2). The support (1, 2) bridges (4-7) and mirror (3) are integrally formed from a silicon substrate. A pair of electrically conductive paths (8, 9) are formed by doping or metallizing portions of the assembly so that by passing controlled currents through the paths, thermal expansion of parts of the paths will cause deflection of the mirror (3). The assembly is particularly useful for deflecting optical beams.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.