Cryogenic process for metal lift-off
US4871651A · kind A · utility
14Cited by
2References
9Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 27, 1988 |
| Grant date | Oct 3, 1989 |
| Priority date | — |
| Expiry date | Jun 27, 2008 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05K3/143
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
This invention is directed to a process for the cryogenic lift-off of metal/resist material from a surface of a substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.