Patent · US Expired

Integrated Schottky diode and transistor

US4871686A · kind A · utility

35Cited by
9References
16Claims
0Family size

Assignee

Inventor

Key dates

Filing dateMar 28, 1988
Grant dateOct 3, 1989
Priority date
Expiry dateMar 28, 2008

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D62/85
  • WIPO fieldBasic communication processes
  • WIPO sectorElectrical engineering

Abstract

An improved means and method is described for forming a Schottky diode integrated with transistors and other devices which is particularly useful where both control circuits and a large power device are on the same chip. Nested N-, P-, N- and P+ regions are formed on an N+ semiconductor substrate. A portion of the overlying dielectric is removed adjacent one of the P+ regions over the N- region and a Schottky contact formed to the N- region and an ohmic contact to the adjacent P+ region. N+ and P+ regions are desirably provided where the junctions between the N-/P- regions and the P-/N- regions intersect the surface to provide contact to the N- and P- regions respectively. A P region extends through the upper N- region and has U-shaped arms which partially overlie an annular shaped P+ region and is located between the active region of the PNP transistor and the collector contact to serve as a Kelvin probe. The arrangement is particularly valuable where a vertical PNP device without a buried collector region is required.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.