Film thickness-measuring apparatus
US4872758A · kind A · utility
71Cited by
4References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 22, 1988 |
| Grant date | Oct 10, 1989 |
| Priority date | — |
| Expiry date | Jul 22, 2008 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/211
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Circularly polarized light caused to be incident on a film surface is converted into three light beams by optical flats to obtain electrical signals corresponding to the intensities of the respective light beams. Two ellipsometric parameters .psi. and .DELTA. are claculated from these three electrical signals.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.