Apparatus comprising a high-vacuum chamber
US4873833A · kind A · utility
37Cited by
10References
8Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 23, 1988 |
| Grant date | Oct 17, 1989 |
| Priority date | — |
| Expiry date | Nov 23, 2008 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S417/901
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
Apparatus comprising a bakeable high vacuum system using cryopumps is disclosed. Auxiliary cooling means in thermal contact with the primary pumping stage of the cryopump remove heat from the cryopump, whereby the walls of the cryopump may be heated during operation of the cryopump, such that the cryopump can be baked. This can result in substantially improved attainable pressure in the system.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.