Force measurement sensor integrated on silicon, and a method of manufacture
US4873868A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Feb 9, 1988 |
| Grant date | Oct 17, 1989 |
| Priority date | — |
| Expiry date | Feb 9, 2008 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/0828
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A mechanical magnitude sensor integrated on silicon, and a method of manufacture. The sensor comprises a bendably deformable conductive blade (4) whose free end (43) constitutes the first plate of a variable capacitor whose fixed second plate (24) is constituted by a conductive zone formed on the silicon substrate. A JFET type structure is formed in the vicinity of the anchor point (41) of the blade (4) with a gate zone (21) situated beneath the anchor portion (41) and with drain and source zones (22, 23) being provided on either side of the gate zone (21) in order to amplify a signal representative of variations in the position of the flexible blade (4). The sensor may be used as an accelerometer or as a pressure sensor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.