Micro displacement force transducer
US4873870A · kind A · utility
14Cited by
6References
25Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jan 19, 1988 |
| Grant date | Oct 17, 1989 |
| Priority date | — |
| Expiry date | Jan 19, 2008 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L9/003
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A sensor system utilizing a bourdon tube to generate a force as a function of pressure to deflect a diaphragm in a capacitor device where the diaphragm varies capacitance values of the capacitor device as a function of the applied force. The capacitor device is an essentially integral circularly shaped construction of quartz material in which the diaphragm is attached to a tubular quartz member. A metal member having a similar coefficient of temperature expansion to the coefficient of the quartz is used to couple the diaphragm to the bourdon tube.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.