Patent · US Expired

Method and apparatus for measuring a three-dimensional curved surface shape

US4874955A · kind A · utility

11Cited by
3References
5Claims
0Family size

Assignee

Inventors

Key dates

Filing dateOct 17, 1988
Grant dateOct 17, 1989
Priority date
Expiry dateOct 17, 2008

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01B11/2441
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A method and apparatus adapted to measure a three-dimensional curved surface shape quantitatively with high speed. A pattern of interference fringes on a surface of an object to be measured is picked up so that while moving a reference plane (or the object to be measured) in the direction of an optical axis, the resulting video signal is processed to form a composite image in which a value of each of picture elements is represented by a position of the reference plane (or a position of the object to be measured) at an instant that one of positions on the object surface corresponding to that picture element in the image attains a maximum brightness. Then, a three-dimensional curved surface shape of the object to be measured is measured on the basis of the composite image.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.